Spectroscopic Ellipsometry

Spectroscopic Ellipsometry
Author :
Publisher : John Wiley & Sons
Total Pages : 388
Release :
ISBN-10 : 0470060182
ISBN-13 : 9780470060186
Rating : 4/5 (186 Downloads)

Book Synopsis Spectroscopic Ellipsometry by : Hiroyuki Fujiwara

Download or read book Spectroscopic Ellipsometry written by Hiroyuki Fujiwara and published by John Wiley & Sons. This book was released on 2007-09-27 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.


Spectroscopic Ellipsometry Related Books

Spectroscopic Ellipsometry
Language: en
Pages: 388
Authors: Hiroyuki Fujiwara
Categories: Technology & Engineering
Type: BOOK - Published: 2007-09-27 - Publisher: John Wiley & Sons

DOWNLOAD EBOOK

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principle
Spectroscopic Ellipsometry
Language: en
Pages: 138
Authors: Harland G. Tompkins
Categories: Technology & Engineering
Type: BOOK - Published: 2015-12-16 - Publisher: Momentum Press

DOWNLOAD EBOOK

Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thicknes
Spectroscopic Ellipsometry for Photovoltaics
Language: en
Pages: 602
Authors: Hiroyuki Fujiwara
Categories: Science
Type: BOOK - Published: 2019-01-10 - Publisher: Springer

DOWNLOAD EBOOK

This book provides a basic understanding of spectroscopic ellipsometry, with a focus on characterization methods of a broad range of solar cell materials/device
Spectroscopic Ellipsometry for Photovoltaics
Language: en
Pages: 628
Authors: Hiroyuki Fujiwara
Categories: Science
Type: BOOK - Published: 2019-01-10 - Publisher: Springer

DOWNLOAD EBOOK

Spectroscopic ellipsometry has been applied to a wide variety of material and device characterizations in solar cell research fields. In particular, device perf
Spectroscopic Ellipsometry and Reflectometry
Language: en
Pages: 0
Authors: Harland G. Tompkins
Categories: Science
Type: BOOK - Published: 1999-03-18 - Publisher: Wiley-Interscience

DOWNLOAD EBOOK

While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optic