Radio-Frequency Capacitive Discharges
Author | : Yuri P. Raizer |
Publisher | : CRC Press |
Total Pages | : 308 |
Release | : 2017-12-14 |
ISBN-10 | : 9781351419956 |
ISBN-13 | : 1351419951 |
Rating | : 4/5 (951 Downloads) |
Download or read book Radio-Frequency Capacitive Discharges written by Yuri P. Raizer and published by CRC Press. This book was released on 2017-12-14 with total page 308 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings. Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students and postgraduates and as a comprehensive guidebook by specialists.