Plasma Etching
| Author | : M. Sugawara |
| Publisher | : OUP Oxford |
| Total Pages | : 362 |
| Release | : 1998-05-28 |
| ISBN-10 | : 9780191590290 |
| ISBN-13 | : 0191590290 |
| Rating | : 4/5 (290 Downloads) |
Book Synopsis Plasma Etching by : M. Sugawara
Download or read book Plasma Etching written by M. Sugawara and published by OUP Oxford. This book was released on 1998-05-28 with total page 362 pages. Available in PDF, EPUB and Kindle. Book excerpt: The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.
