Physics of Radiofrequency Capacitive Discharge

Physics of Radiofrequency Capacitive Discharge
Author :
Publisher : CRC Press
Total Pages : 405
Release :
ISBN-10 : 9780429894220
ISBN-13 : 0429894228
Rating : 4/5 (228 Downloads)

Book Synopsis Physics of Radiofrequency Capacitive Discharge by : V. P. Savinov

Download or read book Physics of Radiofrequency Capacitive Discharge written by V. P. Savinov and published by CRC Press. This book was released on 2018-05-23 with total page 405 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.


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