Optical Inspection of Microsystems, Second Edition

Optical Inspection of Microsystems, Second Edition
Author :
Publisher : CRC Press
Total Pages : 692
Release :
ISBN-10 : 9780429532658
ISBN-13 : 0429532652
Rating : 4/5 (652 Downloads)

Book Synopsis Optical Inspection of Microsystems, Second Edition by : Wolfgang Osten

Download or read book Optical Inspection of Microsystems, Second Edition written by Wolfgang Osten and published by CRC Press. This book was released on 2019-06-21 with total page 692 pages. Available in PDF, EPUB and Kindle. Book excerpt: Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts. Supplying effective tools for increased quality and reliability, this book Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques Offers numerous practical examples and illustrations Includes calibration of optical measurement systems for the inspection of MEMS Presents the characterization of dynamics of MEMS


Optical Inspection of Microsystems, Second Edition Related Books

Optical Inspection of Microsystems, Second Edition
Language: en
Pages: 692
Authors: Wolfgang Osten
Categories: Technology & Engineering
Type: BOOK - Published: 2019-06-21 - Publisher: CRC Press

DOWNLOAD EBOOK

Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive
Optical Inspection of Microsystems
Language: en
Pages: 524
Authors: Wolfgang Osten
Categories: Science
Type: BOOK - Published: 2018-10-03 - Publisher: CRC Press

DOWNLOAD EBOOK

Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative
Microlithography
Language: en
Pages: 866
Authors: Bruce W. Smith
Categories: Technology & Engineering
Type: BOOK - Published: 2018-10-03 - Publisher: CRC Press

DOWNLOAD EBOOK

This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from e
Synthesizing and Characterizing Plant-Mediated Biocompatible Metal Nanoparticles
Language: en
Pages: 508
Authors: Das, Susanta
Categories: Science
Type: BOOK - Published: 2024-11-01 - Publisher: IGI Global

DOWNLOAD EBOOK

Metal nanoparticles, ranging from 1 nanometer (nm) to 100 nm, possess unique physical, chemical, and biological properties, driving significant scientific and t
Optical Waveguides
Language: en
Pages: 353
Authors: MarĂ­a L. Calvo
Categories: Technology & Engineering
Type: BOOK - Published: 2018-10-03 - Publisher: CRC Press

DOWNLOAD EBOOK

Although the theory and principles of optical waveguides have been established for more than a century, the technologies have only been realized in recent decad