MEMS/MOEM Packaging
Author | : Ken Gilleo |
Publisher | : McGraw Hill Professional |
Total Pages | : 239 |
Release | : 2005-08-01 |
ISBN-10 | : 9780071589093 |
ISBN-13 | : 0071589090 |
Rating | : 4/5 (090 Downloads) |
Download or read book MEMS/MOEM Packaging written by Ken Gilleo and published by McGraw Hill Professional. This book was released on 2005-08-01 with total page 239 pages. Available in PDF, EPUB and Kindle. Book excerpt: While MEMS technology has progressed rapidly, commercialization of MEMS has been hindered by packaging technology barriers and costs. One of the key issues in the industrialization of MEMS, MOEM and ultimately Nanoelectrical devices is the development of appropriate packaging solutions for the protection, assembly, and long term reliable operation. This book rigorously examines the properties of the materials used in MEMS and MOEN assembly then evaluates them in terms of their routing, electrical performance, thermal management and reliability. With this as a starting point, the book moves on to discuss advanced packaging methods such as: molded thermoplastic packages for MEMS, wafer-assembled RFID, and wafer-level stacked packaging.