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Introduction to Microelectronic Fabrication
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For courses in Theory and Fabrication of Integrated Circuits. The author's goal in writing this text was to present a concise survey of the most up-to-date tech
The Science and Engineering of Microelectronic Fabrication
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Pages: 572
Authors: Stephen A. Campbell
Categories: Technology & Engineering
Type: BOOK - Published: 1996 - Publisher: Oxford University Press, USA

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The Science and Engineering of Microelectronic Fabrication provides an introduction to microelectronic processing. Geared towards a wide audience, it may be use
Introduction to Microfabrication
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Type: BOOK - Published: 2005-01-28 - Publisher: John Wiley & Sons

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Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsy
Electron-Beam Technology in Microelectronic Fabrication
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Electron-Beam Technology in Microelectronic Fabrication presents a unified description of the technology of high resolution lithography. This book is organized
Fabrication Engineering at the Micro and Nanoscale
Language: en
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Authors: Stephen A. Campbell
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Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering