Chemistry of Atomic Layer Deposition
| Author | : Seán Thomas Barry |
| Publisher | : Walter de Gruyter GmbH & Co KG |
| Total Pages | : 113 |
| Release | : 2021-11-08 |
| ISBN-10 | : 9783110712537 |
| ISBN-13 | : 3110712539 |
| Rating | : 4/5 (539 Downloads) |
Book Synopsis Chemistry of Atomic Layer Deposition by : Seán Thomas Barry
Download or read book Chemistry of Atomic Layer Deposition written by Seán Thomas Barry and published by Walter de Gruyter GmbH & Co KG. This book was released on 2021-11-08 with total page 113 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.
