Wafer Level 3-D ICs Process Technology
Author | : Chuan Seng Tan |
Publisher | : Springer Science & Business Media |
Total Pages | : 365 |
Release | : 2009-06-29 |
ISBN-10 | : 9780387765341 |
ISBN-13 | : 0387765344 |
Rating | : 4/5 (344 Downloads) |
Book Synopsis Wafer Level 3-D ICs Process Technology by : Chuan Seng Tan
Download or read book Wafer Level 3-D ICs Process Technology written by Chuan Seng Tan and published by Springer Science & Business Media. This book was released on 2009-06-29 with total page 365 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book focuses on foundry-based process technology that enables the fabrication of 3-D ICs. The core of the book discusses the technology platform for pre-packaging wafer lever 3-D ICs. However, this book does not include a detailed discussion of 3-D ICs design and 3-D packaging. This is an edited book based on chapters contributed by various experts in the field of wafer-level 3-D ICs process technology. They are from academia, research labs and industry.