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ULSI Process Integration II
Language: en
Pages: 636
Authors: Cor L. Claeys
Categories: Technology & Engineering
Type: BOOK - Published: 2001 - Publisher: The Electrochemical Society

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Advanced Interconnects for ULSI Technology
Language: en
Pages: 616
Authors: Mikhail Baklanov
Categories: Technology & Engineering
Type: BOOK - Published: 2012-02-17 - Publisher: John Wiley & Sons

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Finding new materials for copper/low-k interconnects is critical to the continuing development of computer chips. While copper/low-k interconnects have served w
ULSI Semiconductor Technology Atlas
Language: en
Pages: 688
Authors: Chih-Hang Tung
Categories: Technology & Engineering
Type: BOOK - Published: 2003-10-06 - Publisher: John Wiley & Sons

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More than 1,100 TEM images illustrate the science of ULSI The natural outgrowth of VLSI (Very Large Scale Integration), Ultra Large Scale Integration (ULSI) ref
Rapid Thermal and Other Short-time Processing Technologies II
Language: en
Pages: 458
Authors: Dim-Lee Kwong
Categories: Technology & Engineering
Type: BOOK - Published: 2001 - Publisher: The Electrochemical Society

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"Electronics, Dielectric Science and Technology, and High Temperature Materials Divisions."
Microelectronics, Microsystems and Nanotechnology
Language: en
Pages: 409
Authors: Androula G. Nassiopoulou
Categories: Technology & Engineering
Type: BOOK - Published: 2001 - Publisher: World Scientific

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This volume contains papers on the following: CMOS devices and devices based on compound semiconductors; processing; silicon integrated technology and integrate