Process Technology for Silicon Carbide Devices

Process Technology for Silicon Carbide Devices
Author :
Publisher : IET
Total Pages : 202
Release :
ISBN-10 : 0852969988
ISBN-13 : 9780852969984
Rating : 4/5 (984 Downloads)

Book Synopsis Process Technology for Silicon Carbide Devices by : Carl-Mikael Zetterling

Download or read book Process Technology for Silicon Carbide Devices written by Carl-Mikael Zetterling and published by IET. This book was released on 2002 with total page 202 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book explains why SiC is so useful in electronics, gives clear guidance on the various processing steps (growth, doping, etching, contact formation, dielectrics etc) and describes how these are integrated in device manufacture.


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