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Principles of Vapor Deposition of Thin Films
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Authors: Professor K.S. K.S Sree Harsha
Categories: Technology & Engineering
Type: BOOK - Published: 2005-12-16 - Publisher: Elsevier

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The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in t
Principles of Chemical Vapor Deposition
Language: en
Pages: 298
Authors: Daniel Dobkin
Categories: Technology & Engineering
Type: BOOK - Published: 2003-04-30 - Publisher: Springer Science & Business Media

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Principles of Chemical Vapor Deposition provides a simple introduction to heat and mass transfer, surface and gas phase chemistry, and plasma discharge characte
Handbook of Thin-film Deposition Processes and Techniques
Language: en
Pages: 629
Authors: Krishna Seshan
Categories: Chemical vapor deposition
Type: BOOK - Published: 2002 - Publisher:

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The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology exp
Handbook of Physical Vapor Deposition (PVD) Processing
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This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposit
Sputtering Materials for VLSI and Thin Film Devices
Language: en
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Authors: Jaydeep Sarkar
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An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for