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Language: en
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Type: BOOK - Published: 2018-10-03 - Publisher: CRC Press
This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from e
Language: en
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Type: BOOK - Published: 2014-02-13 - Publisher: Woodhead Publishing
Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerfu
Language: en
Pages: 754
Pages: 754
Type: BOOK - Published: 2001-11-20 - Publisher: Elsevier
Direct-Write Technologies covers applications, materials, and the techniques in using direct-write technologies. This book provides an overview of the different
Language: en
Pages: 636
Pages: 636
Type: BOOK - Published: 2016-11-08 - Publisher: Elsevier
As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist material