Micro and Nano Fabrication
| Author | : Hans H. Gatzen |
| Publisher | : Springer |
| Total Pages | : 537 |
| Release | : 2015-01-02 |
| ISBN-10 | : 9783662443958 |
| ISBN-13 | : 3662443953 |
| Rating | : 4/5 (953 Downloads) |
Book Synopsis Micro and Nano Fabrication by : Hans H. Gatzen
Download or read book Micro and Nano Fabrication written by Hans H. Gatzen and published by Springer. This book was released on 2015-01-02 with total page 537 pages. Available in PDF, EPUB and Kindle. Book excerpt: For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
