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MEMS and Nanotechnology, Volume 2
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Pages: 272
Authors: Tom Proulx
Categories: Technology & Engineering
Type: BOOK - Published: 2011-03-24 - Publisher: Springer Science & Business Media

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This the second volume of six from the Annual Conference of the Society for Experimental Mechanics, 2010, brings together 40 chapters on Microelectromechanical
Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set
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Pages: 1983
Authors: Marc J. Madou
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Type: BOOK - Published: 2018-12-14 - Publisher: CRC Press

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Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised
Manufacturing Techniques for Microfabrication and Nanotechnology
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Authors: Marc J. Madou
Categories: Technology & Engineering
Type: BOOK - Published: 2011-06-13 - Publisher: CRC Press

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Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews differe
Mems and Nanotechnology
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From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications
Language: en
Pages: 650
Authors: Marc J. Madou
Categories: TECHNOLOGY & ENGINEERING
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From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing