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Language: en
Pages: 272
Pages: 272
Type: BOOK - Published: 2011-03-24 - Publisher: Springer Science & Business Media
This the second volume of six from the Annual Conference of the Society for Experimental Mechanics, 2010, brings together 40 chapters on Microelectromechanical
Language: en
Pages: 1983
Pages: 1983
Type: BOOK - Published: 2018-12-14 - Publisher: CRC Press
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised
Language: en
Pages: 672
Pages: 672
Type: BOOK - Published: 2011-06-13 - Publisher: CRC Press
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews differe
Language: en
Pages: 292
Pages: 292
Type: BOOK - Published: 2011-03-30 - Publisher:
Language: en
Pages: 650
Pages: 650
Type: BOOK - Published: 2011 - Publisher: CRC Press
From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing