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Low-dielectric Constant Materials-- Synthesis and Applications in Microelectronics
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Low-dielectric Constant Materials-- Synthesis and Applications in Microelectronics

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Handbook of Semiconductor Manufacturing Technology
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Handbook of Semiconductor Manufacturing Technology

Authors: Yoshio Nishi
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The Handbook of Semiconductor Manufacturing Technology describes the individual processes and manufacturing control, support, and infrastructure technologies of
Proceedings of the Thirteenth International Conference on Chemical Vapor Deposition
Language: en
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Proceedings of the Thirteenth International Conference on Chemical Vapor Deposition

Authors: Theodore M. Besmann
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Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses
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As semiconductor manufacturers implement copper conductors in advanced interconnect schemes, research and development efforts shift toward the selection of an i