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Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and c
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Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framewo
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Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation. T
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Carbon has always been a unique and intriguing material from a funda mental standpoint and, at the same time, a material with many technological uses. Carbon-ba
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Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framewo