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EUV Lithography
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Pages: 704
Authors: Vivek Bakshi
Categories: Art
Type: BOOK - Published: 2009 - Publisher: SPIE Press

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Editorial Review Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This b
EUV Sources for Lithography
Language: en
Pages: 1104
Authors: Vivek Bakshi
Categories: Art
Type: BOOK - Published: 2006 - Publisher: SPIE Press

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This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume conta
Optical and EUV Lithography
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Pages:
Authors: Andreas Erdmann
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Extreme Ultraviolet Lithography
Language: en
Pages: 245
Authors: Harry J. Levinson
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Principles of Lithography
Language: en
Pages: 446
Authors: Harry J. Levinson
Categories: Technology & Engineering
Type: BOOK - Published: 2005 - Publisher: SPIE Press

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Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were