Atomic Layer Deposition of Metal Oxide and Nitride Thin Films [microform]
| Author | : Becker, Jill Svenja |
| Publisher | : Ann Arbor, Mich. : University Microfilms International |
| Total Pages | : 308 |
| Release | : 2002 |
| ISBN-10 | : OCLC:57610360 |
| ISBN-13 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis Atomic Layer Deposition of Metal Oxide and Nitride Thin Films [microform] by : Becker, Jill Svenja
Download or read book Atomic Layer Deposition of Metal Oxide and Nitride Thin Films [microform] written by Becker, Jill Svenja and published by Ann Arbor, Mich. : University Microfilms International. This book was released on 2002 with total page 308 pages. Available in PDF, EPUB and Kindle. Book excerpt:
