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X-Ray Metrology in Semiconductor Manufacturing
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Type: BOOK - Published: 2018-10-03 - Publisher: CRC Press

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The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials
Thin Film Materials, Processes, and Reliability
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The symposium covered three topics: i) plasma processing for
Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes 7
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Diagnostic characterization techniques for semiconductor materials, devices and device processing are addressed at this symposium. It will cover new techniques
Metrology and Diagnostic Techniques for Nanoelectronics
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Nanoelectronics is changing the way the world communicates, and is transforming our daily lives. Continuing Moore’s law and miniaturization of low-power semic
Introduction to Metrology Applications in IC Manufacturing
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Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never