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Efficient Extreme Ultraviolet Mirror Design
Language: en
Pages: 0
Authors: Yen-Min Lee
Categories: Extreme ultraviolet lithography
Type: BOOK - Published: 2021 - Publisher:

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Extreme ultraviolet (EUV) lithography is a next generation platform with the potential to extend Moore's Law. The EUV mirror is a fundamental component of this
Soft X-Rays and Extreme Ultraviolet Radiation
Language: en
Pages: 611
Authors: David Attwood
Categories: Technology & Engineering
Type: BOOK - Published: 2007-02-22 - Publisher: Cambridge University Press

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This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications i
X-Rays and Extreme Ultraviolet Radiation
Language: en
Pages: 655
Authors: David Attwood
Categories: Science
Type: BOOK - Published: 2016 - Publisher: Cambridge University Press

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Master the physics and understand the current applications of modern X-ray and EUV sources with this fully updated second edition.
Ultraviolet and X-ray Spectroscopy of the Solar Atmosphere
Language: en
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Authors: Kenneth J. H. Phillips
Categories: Science
Type: BOOK - Published: 2008-06-26 - Publisher: Cambridge University Press

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This book explores features of the Sun's atmosphere, for graduate students/researchers in astrophysics and solar physics.
Principles of Lithography
Language: en
Pages: 446
Authors: Harry J. Levinson
Categories: Technology & Engineering
Type: BOOK - Published: 2005 - Publisher: SPIE Press

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Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were