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The Physics of Micro/Nano-Fabrication
Language: en
Pages: 661
Authors: Ivor Brodie
Categories: Science
Type: BOOK - Published: 2013-06-29 - Publisher: Springer Science & Business Media

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In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build,
The Physics Of Micro/Nano-Fabrication
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Micro and Nano Fabrication Technology
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Authors: Jiwang Yan
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Type: BOOK - Published: 2018-07-16 - Publisher: Springer

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This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary te
The Physics of Microfabrication
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Authors: Ivor Brodie
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Type: BOOK - Published: 2013-11-11 - Publisher: Springer Science & Business Media

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The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to sub
Micro- and Nanofabrication for Beginners
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Authors: Eiichi Kondoh
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Type: BOOK - Published: 2022-06-13 - Publisher: CRC Press

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In this book, the fundamentals of micro- and nanofabrication are described on the basis of the concept of “using gases as a fabrication tool.” Unlike other