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Silicon Micromachining

Authors: Miko Elwenspoek
Categories: Art
Type: BOOK - Published: 2004-08-19 - Publisher: Cambridge University Press

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A comprehensive overview of the key techniques used in the fabrication of micron-scale structures in silicon; for graduate students and researchers.
Three Dimensional Integration and Packaging Using Silicon Micromachining
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Three Dimensional Integration and Packaging Using Silicon Micromachining

Authors: Alexandros D. Margomenos
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Silicon Wet Bulk Micromachining for MEMS
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Silicon Wet Bulk Micromachining for MEMS

Authors: Prem Pal
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Type: BOOK - Published: 2017-04-07 - Publisher: CRC Press

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Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in ter
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Micromachining

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To present their work in the field of micromachining, researchers from distant parts of the world have joined their efforts and contributed their ideas accordin
Handbook of Silicon Based MEMS Materials and Technologies
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Handbook of Silicon Based MEMS Materials and Technologies

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A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applica