Related Books
Language: en
Pages: 88
Pages: 88
Type: BOOK - Published: 1991-02-01 - Publisher: National Academies Press
Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive,
Language: en
Pages: 213
Pages: 213
Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are exper
Language: en
Pages: 548
Pages: 548
Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media
An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution
Language: en
Pages: 417
Pages: 417
Type: BOOK - Published: 2017-12-19 - Publisher: CRC Press
We are at a critical evolutionary juncture in the research and development of low-temperature plasmas, which have become essential to synthesizing and processin
Language: en
Pages: 664
Pages: 664
Type: BOOK - Published: 2011-06-28 - Publisher: Springer Science & Business Media
Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication.