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Plasma Processing of Materials
Language: en
Pages: 88
Authors: National Research Council
Categories: Technology & Engineering
Type: BOOK - Published: 1991-02-01 - Publisher: National Academies Press

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Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive,
Lecture Notes on Principles of Plasma Processing
Language: en
Pages: 213
Authors: Francis F. Chen
Categories: Science
Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media

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Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are exper
Plasma-Surface Interactions and Processing of Materials
Language: en
Pages: 548
Authors: O. Auciello
Categories: Science
Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media

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An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution
Plasma Processing of Nanomaterials
Language: en
Pages: 417
Authors: R. Mohan Sankaran
Categories: Science
Type: BOOK - Published: 2017-12-19 - Publisher: CRC Press

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We are at a critical evolutionary juncture in the research and development of low-temperature plasmas, which have become essential to synthesizing and processin
Handbook of Advanced Plasma Processing Techniques
Language: en
Pages: 664
Authors: R.J. Shul
Categories: Technology & Engineering
Type: BOOK - Published: 2011-06-28 - Publisher: Springer Science & Business Media

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Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication.