Related Books

Plasma Processing for VLSI
Language: en
Pages: 544
Authors: Norman G. Einspruch
Categories: Technology & Engineering
Type: BOOK - Published: 2014-12-01 - Publisher: Academic Press

DOWNLOAD EBOOK

VLSI Electronics: Microstructure Science, Volume 8: Plasma Processing for VLSI (Very Large Scale Integration) discusses the utilization of plasmas for general s
VLSI Electronics: Plasma processing for VLSI
Language: en
Pages: 552
Authors: Norman G. Einspruch
Categories: Integrated circuits
Type: BOOK - Published: 1981 - Publisher:

DOWNLOAD EBOOK

VLSI Electronics: Plasma processing for VLSI
Language: en
Pages: 480
Authors: Norman G. Einspruch
Categories: Integrated circuits
Type: BOOK - Published: 1981 - Publisher:

DOWNLOAD EBOOK

Applications of Plasma Processes to VLSI Technology
Language: en
Pages: 426
Authors: Takuo Sugano
Categories: Science
Type: BOOK - Published: 1985-09-24 - Publisher: Wiley-Interscience

DOWNLOAD EBOOK

Presents state-of-the-art research in microelectronic processing for very large scale integration. Emphasizing applications and techniques, this book provides c
Plasma Processing of Semiconductors
Language: en
Pages: 610
Authors: P.F. Williams
Categories: Technology & Engineering
Type: BOOK - Published: 2013-11-11 - Publisher: Springer Science & Business Media

DOWNLOAD EBOOK

Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numeric