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Language: en
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Pages: 544
Type: BOOK - Published: 2014-12-01 - Publisher: Academic Press
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Language: en
Pages: 552
Pages: 552
Type: BOOK - Published: 1981 - Publisher:
Language: en
Pages: 480
Pages: 480
Type: BOOK - Published: 1981 - Publisher:
Language: en
Pages: 426
Pages: 426
Type: BOOK - Published: 1985-09-24 - Publisher: Wiley-Interscience
Presents state-of-the-art research in microelectronic processing for very large scale integration. Emphasizing applications and techniques, this book provides c
Language: en
Pages: 610
Pages: 610
Type: BOOK - Published: 2013-11-11 - Publisher: Springer Science & Business Media
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numeric