Faithin Omaha eBook Collection

Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the f

This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from e

The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these p

Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affectin