Faithin Omaha eBook Collection

The papers collected in this volume were presented at the International Symposium on Methods and Materials in Microelectronic Technology. This symposium was spo

As is well known, Silicon widely dominates the market of semiconductor devices and circuits, and in particular is well suited for Ultra Large Scale Integration

The primary thrust of very large scale integration (VLS!) is the miniaturization of devices to increase packing density, achieve higher speed, and consume lower

Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectiv

This book provides an up to date survey of the state of the art of research into the materials used in information technology, and will be bought by researchers