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The field of materials and process integration for MEMS research has an extensive past as well as a long and promising future. Researchers, academicians and eng
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A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applica
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Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building
MEMS Materials and Processes Handbook
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MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific proc
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