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Language: en
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Pages: 572
Type: BOOK - Published: 1996-03-29 - Publisher: Cambridge University Press
Comprehensive guide to an important materials science technique for students and researchers.
Language: en
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Pages: 303
Type: BOOK - Published: 2013-03-12 - Publisher: Springer Science & Business Media
In this book the author discusses the investigation of ion bombardment of solids by computer simulation, with the aim of demonstrating the usefulness of this ap
Language: en
Pages: 547
Pages: 547
Type: BOOK - Published: 2016-07-14 - Publisher: Springer
This book presents the method of ion beam modification of solids in realization, theory and applications in a comprehensive way. It provides a review of the phy
Language: en
Pages: 425
Pages: 425
Type: BOOK - Published: 2012-12-13 - Publisher: Springer Science & Business Media
A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of
Language: en
Pages: 271
Pages: 271
Type: BOOK - Published: 2007-05-16 - Publisher: Springer Science & Business Media
Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and c