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Fabrication of Silicon Nanowires with Controlled Nano-scale Shapes Using Wet Anisotropic Etching
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Silicon nanowires can enable important applications in energy and healthcare such as biochemical sensors, thermoelectric devices, and ultra-capacitors. In the e
Mechanism of Wet Anisotropic Etching of Silicon for Nano-scale Applications
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The fabrication processes of recent MEMS devices require the use of anisotropic etching and variety of concave structures. Analysis of these structures uncovere
Micro- and Nano-Fabrication by Metal Assisted Chemical Etching
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Metal-assisted chemical etching (MacEtch) has recently emerged as a new etching technique capable of fabricating high aspect ratio nano- and microstructures in
Fabrication of Silicon Nanowires and the Effects of Different Parameters on The Fabrication Result
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In today’s world everything is going toward speed and comfort. This includes differenttechnologies which their improvement leads to an easier life for human b
Semiconducting Silicon Nanowires for Biomedical Applications
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In its second, extensively revised second edition, Semiconducting Silicon Nanowires for Biomedical Applications reviews the fabrication, properties, and biomedi