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The latest developments in chemical and biological sensor research and development. Topics include: 1. new selective species recognition surfaces and materials;
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Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Int
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This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) an
Self-Powered and Soft Polymer MEMS/NEMS Devices
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This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review of MEMS/NEMS energy harvesters and self-powered sensors, and
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This book covers the fundamentals of sensor technologies as well as the recent research for the development of environmental, chemical and medical sensor techno