Atomic Layer Deposition for Semiconductors

Atomic Layer Deposition for Semiconductors
Author :
Publisher : Springer Science & Business Media
Total Pages : 266
Release :
ISBN-10 : 9781461480549
ISBN-13 : 146148054X
Rating : 4/5 (54X Downloads)
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Book Synopsis Atomic Layer Deposition for Semiconductors by : Cheol Seong Hwang

Download or read book Atomic Layer Deposition for Semiconductors written by Cheol Seong Hwang and published by Springer Science & Business Media. This book was released on 2013-10-18 with total page 266 pages. Available in PDF, EPUB and Kindle. Book excerpt: Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.


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