Analytical Techniques for Semiconductor Materials and Process Characterization 6 (ALTECH 2009)
| Author | : Bernd O. Kolbesen |
| Publisher | : The Electrochemical Society |
| Total Pages | : 479 |
| Release | : 2009-09 |
| ISBN-10 | : 9781566777407 |
| ISBN-13 | : 1566777402 |
| Rating | : 4/5 (402 Downloads) |
Book Synopsis Analytical Techniques for Semiconductor Materials and Process Characterization 6 (ALTECH 2009) by : Bernd O. Kolbesen
Download or read book Analytical Techniques for Semiconductor Materials and Process Characterization 6 (ALTECH 2009) written by Bernd O. Kolbesen and published by The Electrochemical Society. This book was released on 2009-09 with total page 479 pages. Available in PDF, EPUB and Kindle. Book excerpt: The proceedings of ALTECH 2009 address recent developments and applications of analytical techniques for semiconductor materials, processes and devices. The papers comprise techniques of elemental and structural analysis for bulk and surface impurities and defects, thin films as well as dopants in ultra-shallow junctions.
